How Can the MZDH0850 High-Resolution Series Redefine Your Inspection Precision?
As an optical engineer at Guilin Microtech (MTO), I have often observed that in the world of semiconductor and micro-CNC machining, the difference between “good”
Tell us your requests on the working distance, optical magnification, and coaxial-illumination or not, we can design for you.
| Form1:In the condition of matched with 1X front-end objectives(WD:82mm) | ||||
| Model | Objective | Total Mag. | FOV(mm) | |
| 1/3″、9″ | 1/3″、17″ | |||
| MTDP07 | 0.7X | 28X | 42X | 6.9X5.1 |
| MTDP07C | ||||
| MTDP10 | 1.0X | 40X | 60X | 4.8X3.6 |
| MTDP10C | ||||
| MTDP20 | 2.0X | 80X | 120X | 2.4X1.8 |
| MTDP20C | ||||
| MTDP30 | 3.0X | 120X | 180X | 1.6X1.2 |
| MTDP30C | ||||
| MTDP40 | 4.0X | 160X | 240X | 1.2X0.9 |
| MTDP40C | ||||
| MTDP50 | 5.0X | 200X | 300X | 0.96X0.72 |
| MTDP50C | ||||
| MTDP60 | 6.0X | 240X | 360X | 0.8X0.6 |
| MTDP60C | ||||
| MTDP80 | 8.0X | 320X | 480X | 0.60X0.45 |
| MTDP80C | ||||
| Form2:In the condition of Using different front-end objectives | |||||||||
| Front-end objectives | Items | MTDP10 | MTDP07 | MTDP20 | MTDP30 | MTDP40 | MTDP50 | MTDP60 | MTDP80 |
| MTDP10C | MTDP07C | MTDP20C | MTDP30C | MTDP40C | MTDP50C | MTDP60C | MTDP80C | ||
| 1X | Optical Mag. | 1.0X | 0.7X | 2.0X | 3.0X | 4.0X | 5.0X | 6.0X | 8.0X |
| DOF(μm) | 412.4 | 589.1 | 206.2 | 137.5 | 103.1 | 82.5 | 68.7 | 51.5 | |
| 0.3X | Optical Mag. | 0.3X | 0.21X | 0.6X | 0.9X | 1.2X | 1.5X | 1.8X | 2.4X |
| DOF(μm) | 4597.7 | 6568.1 | 2298.9 | 459.8 | 1149.4 | 919.5 | 766.3 | 574.7 | |
| 0.5X | Optical Mag. | 0.5X | 0.35X | 1.0X | 1.5X | 2.0X | 2.5X | 3.0X | 4.0X |
| DOF(μm) | 1666.7 | 2381 | 833.3 | 555.6 | 416.7 | 333.3 | 277.8 | 208.3 | |
| 0.75X | Optical Mag. | 0.75X | 0.5X | 1.5X | 2.3X | 3.0X | 3.8X | 4.5X | 6.0X |
| DOF(μm) | 740.7 | 1111.1 | 370.4 | 241.5 | 185.2 | 146.2 | 123.5 | 92.6 | |
| 1.5X | Optical Mag. | 1.5X | 1.1X | 3.0X | 4.5X | 6.0X | 7.5X | 9.0X | 12.0X |
| DOF(μm) | 190.5 | 259.7 | 95.2 | 63.5 | 47.6 | 38.1 | 31.7 | 23.8 | |
| 2X | Optical Mag. | 2X | 1.4X | 4.0X | 6.0X | 8.0X | 10.0X | 12.0X | 16.0X |
| DOF(μm) | 105.3 | 150.4 | 52.6 | 35.1 | 26.3 | 21.1 | 17.5 | 13.2 | |
| 5X | Optical Mag. | 5X | 3.5X | 10X | 15X | 20X | 25X | 30X | 40X |
| DOF(μm) | 16.7 | 23.8 | 8.3 | 5.6 | 4.2 | 3.3 | 2.8 | 2.1 | |
| Form3:In the condition of Using different front-end objectives | |||||||
| Front-end objectives | 1X | 0.3X | 0.5X | 0.75X | 1.5X | 2X | 5X |
| WD(mm) | 82 | 293 | 175 | 117 | 54 | 35 | 10.1 |
| Resolution(μm) | 3.5 | 11.6 | 7 | 4.7 | 2.4 | 1.8 | 0.7 |
| NA | 0.097 | 0.029 | 0.048 | 0.072 | 0.14 | 0.19 | 0.48 |
MTDP20:
MTPD20C:
| Auxiliary illuminators | MLC1000,MLR25 |
| metallographic objectives | 5X, 10X, 20X |
| Objectives (MZDH series) | 0.3X, 0.5X,0.75X, |
focus holders | SF1, SF5(coarse-fine) | |
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